Journal
IEEE ELECTRON DEVICE LETTERS
Volume 33, Issue 8, Pages 1147-1149Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2012.2201131
Keywords
Passivation; plasma immersion; tetrafluoromethane; thin-film transistor (TFT); zinc oxide
Categories
Funding
- Research Grants Council of the Hong Kong Special Administrative Region [620907]
Ask authors/readers for more resources
Plasma-immersion doping, a technique more compatible with the processing of large-area glass substrates, is investigated as a replacement of ion implantation for incorporating fluorine in a zinc oxide thin film to improve the electrical characteristics of the corresponding thin-film transistors. Since the average energy of the ions in a plasma is lower than that of the ions used for implantation, less damage is induced in the channel of a transistor by the bombardment of the ions. Consequently, enhancement-mode transistors with a relatively high field-effect mobility of similar to 71 cm(2)/V.s, a lower drain leakage current, and improved reliability have been realized.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available