4.6 Article

Schottky Barrier Height Inhomogeneity-Induced Deviation From Near-Ideal Pd/InAlN Schottky Contact

Journal

IEEE ELECTRON DEVICE LETTERS
Volume 32, Issue 5, Pages 620-622

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2011.2110634

Keywords

Current-voltage (I-V); GaN; InAlN; quantum dot; Schottky barrier height (SBH) inhomogeneity; Schottky diode

Funding

  1. Ministry of Education, Culture, Sports, Science and Technology
  2. Knowledge Cluster Initiative (Tokai Region Nanotechnology Manufacturing Cluster)

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A Pd/InAlN Schottky diode with leakage current as low as 1.01 x 10(-6) A/cm(2) at -5 V at 300 K has been fabricated. It is found that the current-voltage (I-V) characteristics of Pd/InAlN Schottky contact can be quantitatively described by taking into account the inhomogeneity of Schottky barrier height (SBH), and the SBH inhomogeneity is the main cause for the significant deviation from an ideal Schottky contact. The SBH inhomogeneity is suggested to be related to the quantum dotlike structure on InAlN surface, indicating the importance of surface effect to the investigations on those devices involving InAlN-based Schottky contact.

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