Oxygen-Soluble Gate Electrodes for Prolonged High-$ \kappa$ Gate-Stack Reliability

Title
Oxygen-Soluble Gate Electrodes for Prolonged High-$ \kappa$ Gate-Stack Reliability
Authors
Keywords
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Journal
IEEE ELECTRON DEVICE LETTERS
Volume 32, Issue 3, Pages 252-254
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2011-01-07
DOI
10.1109/led.2010.2099096

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