Fabrication of 150-nm T-Gate Metamorphic AlInAs/GaInAs HEMTs on GaAs Substrates by MOCVD

Title
Fabrication of 150-nm T-Gate Metamorphic AlInAs/GaInAs HEMTs on GaAs Substrates by MOCVD
Authors
Keywords
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Journal
IEEE ELECTRON DEVICE LETTERS
Volume 32, Issue 9, Pages 1224-1226
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2011-07-27
DOI
10.1109/led.2011.2159824

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