Characterization of Selectively Deposited Cobalt Capping Layers: Selectivity and Electromigration Resistance

Published 2010 View Full Article

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Title
Characterization of Selectively Deposited Cobalt Capping Layers: Selectivity and Electromigration Resistance
Authors
Keywords
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Journal
IEEE ELECTRON DEVICE LETTERS
Volume 31, Issue 7, Pages 728-730
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2010-05-27
DOI
10.1109/led.2010.2048298
References
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