Improved Electrical Performance of MILC Poly-Si TFTs Using $\hbox{CF}_{4}$ Plasma by Etching Surface of Channel

Title
Improved Electrical Performance of MILC Poly-Si TFTs Using $\hbox{CF}_{4}$ Plasma by Etching Surface of Channel
Authors
Keywords
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Journal
IEEE ELECTRON DEVICE LETTERS
Volume 30, Issue 2, Pages 130-132
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2009-01-06
DOI
10.1109/led.2008.2010064

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