4.6 Article

Improvement of external extraction efficiency in GaN-based LEDs by SiO2 nanosphere lithography

Journal

IEEE ELECTRON DEVICE LETTERS
Volume 29, Issue 7, Pages 658-660

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2008.2000918

Keywords

extraction efficiency; light-emitting diodes (LEDs); nanosphere lithography

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A practical approach to fabricate textured GaN-based light-emitting diodes (LEDs) by nanosphere lithography is presented. By spin coating a monolayer of SiO(2) nanoparticles as the mask, textured LEDs can be fabricated. Both textured p-GaN and textured indium tin oxide LEDs show significant improvement over conventional LEDs without damaging the electrical characteristics. The results show that the method is promising for manufacturing low-cost high-efficient GaN-based LEDs.

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