Combinatorial atmospheric pressure chemical vapour deposition (cAPCVD) of a mixed vanadium oxide and vanadium oxynitride thin film

标题
Combinatorial atmospheric pressure chemical vapour deposition (cAPCVD) of a mixed vanadium oxide and vanadium oxynitride thin film
作者
关键词
-
出版物
JOURNAL OF MATERIALS CHEMISTRY
Volume 19, Issue 10, Pages 1399
出版商
Royal Society of Chemistry (RSC)
发表日期
2009-01-28
DOI
10.1039/b817429f

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