Atmospheric Pressure Chemical Vapour Deposition of TiCl4 and tBuAsH2 to Form Titanium Arsenide Thin Films

标题
Atmospheric Pressure Chemical Vapour Deposition of TiCl4 and tBuAsH2 to Form Titanium Arsenide Thin Films
作者
关键词
-
出版物
EUROPEAN JOURNAL OF INORGANIC CHEMISTRY
Volume 2010, Issue 36, Pages 5629-5634
出版商
Wiley
发表日期
2010-11-06
DOI
10.1002/ejic.201000839

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