Si-Compatible Cleaning Process for Graphene Using Low-Density Inductively Coupled Plasma

标题
Si-Compatible Cleaning Process for Graphene Using Low-Density Inductively Coupled Plasma
作者
关键词
-
出版物
ACS Nano
Volume 6, Issue 5, Pages 4410-4417
出版商
American Chemical Society (ACS)
发表日期
2012-04-20
DOI
10.1021/nn301093h

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