Suppression of substrate oxidation during ozone based atomic layer deposition of Al2O3: Effect of ozone flow rate

标题
Suppression of substrate oxidation during ozone based atomic layer deposition of Al2O3: Effect of ozone flow rate
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 97, Issue 16, Pages 162903
出版商
AIP Publishing
发表日期
2010-10-19
DOI
10.1063/1.3500821

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