Thermally induced permittivity enhancement in La-doped ZrO2 grown by atomic layer deposition on Ge(100)
出版年份 2009 全文链接
标题
Thermally induced permittivity enhancement in La-doped ZrO2 grown by atomic layer deposition on Ge(100)
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 95, Issue 12, Pages 122902
出版商
AIP Publishing
发表日期
2009-09-24
DOI
10.1063/1.3227669
参考文献
相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。- Atomic layer deposition of LaxZr1−xO2−δ (x=0.25) high-k dielectrics for advanced gate stacks
- (2009) D. Tsoutsou et al. APPLIED PHYSICS LETTERS
- Stabilization of a very high-k tetragonal ZrO2 phase by direct doping with germanium
- (2009) D. Tsoutsou et al. MICROELECTRONIC ENGINEERING
- First-principles study of the structural and electronic properties of (100)Ge∕Ge(M)O2 interfaces (M=Al, La, or Hf)
- (2008) M. Houssa et al. APPLIED PHYSICS LETTERS
- Effective surface passivation methodologies for high performance germanium metal oxide semiconductor field effect transistors
- (2008) H. J. Na et al. APPLIED PHYSICS LETTERS
- Evidence of dangling bond electrical activity at the Ge/oxide interface
- (2008) Silvia Baldovino et al. APPLIED PHYSICS LETTERS
- Very high-κ ZrO2 with La2O3 (LaGeOx) passivating interfacial layers on germanium substrates
- (2008) G. Mavrou et al. APPLIED PHYSICS LETTERS
- Germanium-induced stabilization of a very high-k zirconia phase in ZrO2/GeO2 gate stacks
- (2008) P. Tsipas et al. APPLIED PHYSICS LETTERS
- The effect of dopants on the dielectric constant of HfO[sub 2] and ZrO[sub 2] from first principles
- (2008) Dominik Fischer et al. APPLIED PHYSICS LETTERS
- Interface control of high-k gate dielectrics on Ge
- (2008) M. Caymax et al. APPLIED SURFACE SCIENCE
- Ge-Interface Engineering With Ozone Oxidation for Low Interface-State Density
- (2008) Duygu Kuzum et al. IEEE ELECTRON DEVICE LETTERS
- Stabilization of the high-k tetragonal phase in HfO2: The influence of dopants and temperature from ab initio simulations
- (2008) Dominik Fischer et al. JOURNAL OF APPLIED PHYSICS
- Electrical properties of La2O3 and HfO2∕La2O3 gate dielectrics for germanium metal-oxide-semiconductor devices
- (2008) G. Mavrou et al. JOURNAL OF APPLIED PHYSICS
- Chemical/Structural Nanocharacterization and Electrical Properties of ALD-Grown La[sub 2]O[sub 3]∕Si Interfaces for Advanced Gate Stacks
- (2008) S. Schamm et al. JOURNAL OF THE ELECTROCHEMICAL SOCIETY
- High-k/Ge MOSFETs for future nanoelectronics
- (2008) Yoshiki Kamata Materials Today
- First-principles study on doping and phase stability ofHfO2
- (2008) Choong-Ki Lee et al. PHYSICAL REVIEW B
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