Chemical/Structural Nanocharacterization and Electrical Properties of ALD-Grown La[sub 2]O[sub 3]∕Si Interfaces for Advanced Gate Stacks

出版年份 2008 全文链接

标题

作者

关键词

出版物

Volume 156, Issue 1, Pages H1

出版商

The Electrochemical Society

发表日期

2008-11-25

DOI

10.1149/1.3000594

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