Understanding the electron-stimulated surface reactions of organometallic complexes to enable design of precursors for electron beam-induced deposition

标题
Understanding the electron-stimulated surface reactions of organometallic complexes to enable design of precursors for electron beam-induced deposition
作者
关键词
Electron Irradiation, Organometallic Complex, Organic Contamination, Dissociative Electron Attachment, Electron Dose
出版物
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Volume 117, Issue 4, Pages 1631-1644
出版商
Springer Nature
发表日期
2014-08-20
DOI
10.1007/s00339-014-8570-5

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