Understanding the electron-stimulated surface reactions of organometallic complexes to enable design of precursors for electron beam-induced deposition
出版年份 2014 全文链接
标题
Understanding the electron-stimulated surface reactions of organometallic complexes to enable design of precursors for electron beam-induced deposition
作者
关键词
Electron Irradiation, Organometallic Complex, Organic Contamination, Dissociative Electron Attachment, Electron Dose
出版物
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Volume 117, Issue 4, Pages 1631-1644
出版商
Springer Nature
发表日期
2014-08-20
DOI
10.1007/s00339-014-8570-5
参考文献
相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。- Electron Induced Surface Reactions of Organometallic Metal(hfac)2 Precursors and Deposit Purification
- (2014) Samantha G. Rosenberg et al. ACS Applied Materials & Interfaces
- Electron Beam Induced Reactions of Adsorbed Cobalt Tricarbonyl Nitrosyl (Co(CO)3NO) Molecules
- (2013) Samantha G. Rosenberg et al. Journal of Physical Chemistry C
- Electron induced reactions of surface adsorbed tungsten hexacarbonyl (W(CO)6)
- (2013) Samantha G. Rosenberg et al. PHYSICAL CHEMISTRY CHEMICAL PHYSICS
- Electrically conducting, ultra-sharp, high aspect-ratio probes for AFM fabricated by electron-beam-induced deposition of platinum
- (2013) Jason Brown et al. ULTRAMICROSCOPY
- Three dimensional magnetic nanowires grown by focused electron-beam induced deposition
- (2013) Amalio Fernández-Pacheco et al. Scientific Reports
- Volatile Methylplatinum Complexes - Formation and Reactions in Anhydrous HF
- (2012) Roland Friedemann et al. EUROPEAN JOURNAL OF INORGANIC CHEMISTRY
- Gas phase low energy electron induced decomposition of the focused electron beam induced deposition (FEBID) precursor trimethyl (methylcyclopentadienyl) platinum(iv) (MeCpPtMe3)
- (2012) Sarah Engmann et al. PHYSICAL CHEMISTRY CHEMICAL PHYSICS
- Focused electron beam induced deposition: A perspective
- (2012) Michael Huth et al. Beilstein Journal of Nanotechnology
- Tuning the electrical conductivity of Pt-containing granular metals by postgrowth electron irradiation
- (2011) F. Porrati et al. JOURNAL OF APPLIED PHYSICS
- Focused Electron Beam Deposition of Nanowires from Cobalt Tricarbonyl Nitrosyl (Co(CO)3NO) Precursor
- (2011) Gian Carlo Gazzadi et al. Journal of Physical Chemistry C
- Low-Energy Electron-Induced Decomposition and Reactions of Adsorbed Tetrakis(trifluorophosphine)platinum [Pt(PF3)4]
- (2011) Kees Landheer et al. Journal of Physical Chemistry C
- Ultrahigh resolution focused electron beam induced processing: the effect of substrate thickness
- (2011) W F van Dorp et al. NANOTECHNOLOGY
- Dissociative electron attachment to Pt(PF3)4—a precursor for Focused Electron Beam Induced Processing (FEBIP)
- (2011) Olivier May et al. PHYSICAL CHEMISTRY CHEMICAL PHYSICS
- Characterization of a new cobalt precursor for focused beam deposition of magnetic nanostructures
- (2010) G.C. Gazzadi et al. MICROELECTRONIC ENGINEERING
- Granular Co–C nano-Hall sensors by focused-beam-induced deposition
- (2010) Mihai Gabureac et al. NANOTECHNOLOGY
- Functional plasmonic antenna scanning probes fabricated by induced-deposition mask lithography
- (2010) A Weber-Bargioni et al. NANOTECHNOLOGY
- Domain wall conduit behavior in cobalt nanowires grown by focused electron beam induced deposition
- (2009) A. Fernández-Pacheco et al. APPLIED PHYSICS LETTERS
- Electron induced dissociation of trimethyl (methylcyclopentadienyl) platinum (IV): Total cross section as a function of incident electron energy
- (2009) W. F. van Dorp et al. JOURNAL OF APPLIED PHYSICS
- Electron Induced Surface Reactions of the Organometallic Precursor Trimethyl(methylcyclopentadienyl)platinum(IV)
- (2009) Joshua D. Wnuk et al. Journal of Physical Chemistry C
- Composition Control of Electron Beam Induced Nanodeposits by Surface Pretreatment and Beam Focusing
- (2009) Ilya Sychugov et al. Journal of Physical Chemistry C
- Magnetotransport properties of high-quality cobalt nanowires grown by focused-electron-beam-induced deposition
- (2009) A Fernández-Pacheco et al. JOURNAL OF PHYSICS D-APPLIED PHYSICS
- Electron beam induced deposition of cobalt for use as single- and multiwalled carbon nanotube growth catalyst
- (2009) M. H. Ervin et al. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
- Electron postgrowth irradiation of platinum-containing nanostructures grown by electron-beam-induced deposition from Pt(PF[sub 3])[sub 4]
- (2009) A. Botman et al. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
- Post-deposition processes for nanostructures formed by electron beam induced deposition with Pt(PF3)4 precursor
- (2008) M. Takeguchi et al. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
- A critical literature review of focused electron beam induced deposition
- (2008) W. F. van Dorp et al. JOURNAL OF APPLIED PHYSICS
- Investigation of morphological changes in platinum-containing nanostructures created by electron-beam-induced deposition
- (2008) A. Botman et al. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
- Gas-assisted focused electron beam and ion beam processing and fabrication
- (2008) Ivo Utke et al. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
- Improving the conductivity of platinum-containing nano-structures created by electron-beam-induced deposition
- (2008) A. Botman et al. MICROELECTRONIC ENGINEERING
- Electron beam induced deposited etch masks
- (2008) C.Th.H. Heerkens et al. MICROELECTRONIC ENGINEERING
- Growth behavior near the ultimate resolution of nanometer-scale focused electron beam-induced deposition
- (2008) W F van Dorp et al. NANOTECHNOLOGY
- Single-crystal nanowires grown via electron-beam-induced deposition
- (2008) K L Klein et al. NANOTECHNOLOGY
Publish scientific posters with Peeref
Peeref publishes scientific posters from all research disciplines. Our Diamond Open Access policy means free access to content and no publication fees for authors.
Learn MoreCreate your own webinar
Interested in hosting your own webinar? Check the schedule and propose your idea to the Peeref Content Team.
Create Now