Improving the conductivity of platinum-containing nano-structures created by electron-beam-induced deposition

标题
Improving the conductivity of platinum-containing nano-structures created by electron-beam-induced deposition
作者
关键词
-
出版物
MICROELECTRONIC ENGINEERING
Volume 85, Issue 5-6, Pages 1139-1142
出版商
Elsevier BV
发表日期
2008-01-05
DOI
10.1016/j.mee.2007.12.036

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