A micromachined thermally compensated thin film Lamb wave resonator for frequency control and sensing applications

标题
A micromachined thermally compensated thin film Lamb wave resonator for frequency control and sensing applications
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 19, Issue 3, Pages 035018
出版商
IOP Publishing
发表日期
2009-02-19
DOI
10.1088/0960-1317/19/3/035018

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