Charge trapping properties of the HfO2 layer with various thicknesses for charge trap flash memory applications

标题
Charge trapping properties of the HfO2 layer with various thicknesses for charge trap flash memory applications
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 96, Issue 9, Pages 093506
出版商
AIP Publishing
发表日期
2010-03-08
DOI
10.1063/1.3337103

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