Mitigating Thermoelastic Dissipation of Flexural Micromechanical Resonators by Decoupling Resonant Frequency from Thermal Relaxation Rate

标题
Mitigating Thermoelastic Dissipation of Flexural Micromechanical Resonators by Decoupling Resonant Frequency from Thermal Relaxation Rate
作者
关键词
-
出版物
Physical Review Applied
Volume 8, Issue 6, Pages -
出版商
American Physical Society (APS)
发表日期
2018-01-11
DOI
10.1103/physrevapplied.8.064033

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