Stiffness-mass decoupled silicon disk resonator for high resolution gyroscopic application with long decay time constant (8.695 s)
出版年份 2016 全文链接
标题
Stiffness-mass decoupled silicon disk resonator for high resolution gyroscopic application with long decay time constant (8.695 s)
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 109, Issue 26, Pages 263501
出版商
AIP Publishing
发表日期
2016-12-28
DOI
10.1063/1.4972971
参考文献
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