Encapsulated high frequency (235 kHz), high-Q (100 k) disk resonator gyroscope with electrostatic parametric pump

Fused-Silica Micro Birdbath Resonator Gyroscope ($\mu$-BRG)

(2014) Jae Yoong Cho et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

What is MEMS Gyrocompassing? Comparative Analysis of Maytagging and Carouseling

(2013) Igor P. Prikhodko et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Compensation of drifts in high-Q MEMS gyroscopes using temperature self-sensing

(2013) Igor P. Prikhodko et al.   SENSORS AND ACTUATORS A-PHYSICAL

Quantum Limit of Quality Factor in Silicon Micro and Nano Mechanical Resonators

(2013) Shirin Ghaffari et al.   Scientific Reports

Parametrically Amplified $Z$-Axis Lorentz Force Magnetometer

(2011) Matthew J. Thompson et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

A parametrically amplified MEMS rate gyroscope

(2011) Z.X. Hu et al.   SENSORS AND ACTUATORS A-PHYSICAL

Parametric resonance: Amplification and damping in MEMS gyroscopes

(2011) Mrigank Sharma et al.   SENSORS AND ACTUATORS A-PHYSICAL

What is the Young's Modulus of Silicon?

(2010) Matthew A. Hopcroft et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

An experimental study of high gain parametric amplification in MEMS

(2009) Zhongxu Hu et al.   SENSORS AND ACTUATORS A-PHYSICAL