Theory of Thermoelastic Damping in Micromechanical Resonators With Two-Dimensional Heat Conduction

出版年份 2008 全文链接

标题

作者

关键词

出版物

Volume 17, Issue 2, Pages 494-502

出版商

Institute of Electrical and Electronics Engineers (IEEE)

发表日期

2008-04-10

DOI

10.1109/jmems.2008.916316

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