Preparation of Silicon Nanopowder by Recycling Silicon Wafer Waste in Radio-Frequency Thermal Plasma Process

标题
Preparation of Silicon Nanopowder by Recycling Silicon Wafer Waste in Radio-Frequency Thermal Plasma Process
作者
关键词
Silicon waste, Silicon nanopowder, Radio-frequency thermal plasma, Counter-flow injection apparatus
出版物
PLASMA CHEMISTRY AND PLASMA PROCESSING
Volume 37, Issue 4, Pages 967-978
出版商
Springer Nature
发表日期
2017-03-27
DOI
10.1007/s11090-017-9814-x

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