期刊
PLASMA SOURCES SCIENCE & TECHNOLOGY
卷 21, 期 2, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/0963-0252/21/2/025001
关键词
-
资金
- Seventh European Framework Programme
- Grants-in-Aid for Scientific Research [23560182] Funding Source: KAKEN
Nano-particle synthesis by means of inductively coupled plasma torches is a material process of large technological interest. Numerous parameters are involved in the optimization of this process; hence the development of numerical models for the prediction of thermal and magneto-fluid dynamics fields, precursor powder trajectories and thermal history, as well as nano-particle formation and growth, is necessary for the up-scaling of these devices from laboratory batch production to an industrial continuous process. In this work, a two-dimensional (2D) discrete-type model (nodal model) for the analysis of nano-powder nucleation and growth is presented, taking into account convection, diffusion and turbulent effects on particle formation. Discrete-type models feature high precision and reveal a great deal of information useful for clarifying the nano-particle formation process. Using Si as the precursor material, 2D simulations of a nano-particle synthesis RF plasma apparatus with a reaction chamber are carried out. Good agreement is found when comparing results obtained with this model with those coming from a well-established nucleation-coupled moment method. Moreover, the extended amount of obtainable information that characterizes the nodal model is underlined.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据