Nonlinear laser lithography for indefinitely large-area nanostructuring with femtosecond pulses

标题
Nonlinear laser lithography for indefinitely large-area nanostructuring with femtosecond pulses
作者
关键词
-
出版物
Nature Photonics
Volume 7, Issue 11, Pages 897-901
出版商
Springer Nature
发表日期
2013-10-18
DOI
10.1038/nphoton.2013.272

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