20nm Pitch Directed Block Copolymer Assembly Using Solvent Annealing for Bit Patterned Media

标题
20nm Pitch Directed Block Copolymer Assembly Using Solvent Annealing for Bit Patterned Media
作者
关键词
-
出版物
JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY
Volume 23, Issue 2, Pages 145-148
出版商
Technical Association of Photopolymers, Japan
发表日期
2010-08-05
DOI
10.2494/photopolymer.23.145

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