标题
CMOS MEMS Fabrication Technologies and Devices
作者
关键词
-
出版物
Micromachines
Volume 7, Issue 1, Pages 14
出版商
MDPI AG
发表日期
2016-01-23
DOI
10.3390/mi7010014
参考文献
相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。- A Minimally Invasive 64-Channel Wireless μECoG Implant
- (2015) Rikky Muller et al. IEEE JOURNAL OF SOLID-STATE CIRCUITS
- Design and Characterization of a Dual-Mode CMOS-MEMS Resonator for TCF Manipulation
- (2015) Ming-Huang Li et al. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- CMOS–MEMS resonators: From devices to applications
- (2015) A. Uranga et al. MICROELECTRONIC ENGINEERING
- A CMOS Micromachined Capacitive Tactile Sensor With Integrated Readout Circuits and Compensation of Process Variations
- (2014) Tsung-Heng Tsai et al. IEEE Transactions on Biomedical Circuits and Systems
- A gyroscope fabrication method for high sensitivity and robustness to fabrication tolerances
- (2014) Jungwoo Sung et al. JOURNAL OF MICROMECHANICS AND MICROENGINEERING
- Oven-Based Thermally Tunable Aluminum Nitride Microresonators
- (2013) Bongsang Kim et al. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- CMOS MEMS capacitive absolute pressure sensor
- (2013) M Narducci et al. JOURNAL OF MICROMECHANICS AND MICROENGINEERING
- Thermal de-isolation of silicon microstructures in a plasma etching environment
- (2013) Yong-Seok Lee et al. JOURNAL OF MICROMECHANICS AND MICROENGINEERING
- Monolithic CMUT-on-CMOS integration for intravascular ultrasound applications
- (2012) Jaime Zahorian et al. IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL
- A Three-Axis CMOS-MEMS Accelerometer Structure With Vertically Integrated Fully Differential Sensing Electrodes
- (2012) Ming-Han Tsai et al. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- Three-Dimensional Hybrid Integration Technology of CMOS, MEMS, and Photonics Circuits for Optoelectronic Heterogeneous Integrated Systems
- (2011) Kang-Wook Lee et al. IEEE TRANSACTIONS ON ELECTRON DEVICES
- Numerical analysis and demonstration of a 2-DOF large-size micromirror with sloped electrodes
- (2011) Joo-Young Jin et al. JOURNAL OF MICROMECHANICS AND MICROENGINEERING
- A new process for CMOS MEMS capacitive sensors with high sensitivity and thermal stability
- (2011) S S Tan et al. JOURNAL OF MICROMECHANICS AND MICROENGINEERING
- A generalized CMOS-MEMS platform for micromechanical resonators monolithically integrated with circuits
- (2011) Wen-Chien Chen et al. JOURNAL OF MICROMECHANICS AND MICROENGINEERING
- A Low-Cost CMOS-MEMS Piezoresistive Accelerometer with Large Proof Mass
- (2011) Mohd Haris Md Khir et al. SENSORS
- Fully differential CMOS-MEMS z-axis accelerometer with torsional structures and planar comb fingers
- (2010) Mohd Haris Journal of Micro-Nanolithography MEMS and MOEMS
- A Versatile Integration Technology of SOI-MEMS/CMOS Devices Using Microbridge Interconnection Structures
- (2010) Hidekuni Takao et al. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- CMOS-SOI-MEMS Transistor for Uncooled IR Imaging
- (2009) L. Gitelman et al. IEEE TRANSACTIONS ON ELECTRON DEVICES
- CMOS-MEMS Capacitive Humidity Sensor
- (2009) Nathan Lazarus et al. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- Capacitive Micro Pressure Sensor Integrated with a Ring Oscillator Circuit on Chip
- (2009) Ching-Liang Dai et al. SENSORS
- A Monolithic CMOS-MEMS 3-Axis Accelerometer With a Low-Noise, Low-Power Dual-Chopper Amplifier
- (2008) Hongwei Qu et al. IEEE SENSORS JOURNAL
- Novel High-$Q$ MEMS Curled-Plate Variable Capacitors Fabricated in 0.35-$\mu{\hbox {m}}$ CMOS Technology
- (2008) Maher Bakri-Kassem et al. IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES
- Tungsten-Based SOI Microhotplates for Smart Gas Sensors
- (2008) S.Z. Ali et al. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- Wafer level packaging of MEMS
- (2008) Masayoshi Esashi JOURNAL OF MICROMECHANICS AND MICROENGINEERING
- Technologies for Cofabricating MEMS and Electronics
- (2008) G.K. Fedder et al. PROCEEDINGS OF THE IEEE
Create your own webinar
Interested in hosting your own webinar? Check the schedule and propose your idea to the Peeref Content Team.
Create NowAsk a Question. Answer a Question.
Quickly pose questions to the entire community. Debate answers and get clarity on the most important issues facing researchers.
Get Started