Low loss single-crystal silicon mechanical resonators for the investigation of thermal noise statistical properties

标题
Low loss single-crystal silicon mechanical resonators for the investigation of thermal noise statistical properties
作者
关键词
MEMS bulk-micromachining, Thermal noise, Low-dissipation silicon resonators
出版物
SENSORS AND ACTUATORS A-PHYSICAL
Volume 227, Issue -, Pages 48-54
出版商
Elsevier BV
发表日期
2015-04-06
DOI
10.1016/j.sna.2015.03.037

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