Evidence of Surface Loss as Ubiquitous Limiting Damping Mechanism in SiN Micro- and Nanomechanical Resonators
出版年份 2014 全文链接
标题
Evidence of Surface Loss as Ubiquitous Limiting Damping Mechanism in SiN Micro- and Nanomechanical Resonators
作者
关键词
-
出版物
PHYSICAL REVIEW LETTERS
Volume 113, Issue 22, Pages -
出版商
American Physical Society (APS)
发表日期
2014-12-05
DOI
10.1103/physrevlett.113.227201
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