Atomic Layer Deposition of Lithium Tantalate Solid-State Electrolytes

标题
Atomic Layer Deposition of Lithium Tantalate Solid-State Electrolytes
作者
关键词
-
出版物
Journal of Physical Chemistry C
Volume 117, Issue 39, Pages 20260-20267
出版商
American Chemical Society (ACS)
发表日期
2013-09-06
DOI
10.1021/jp4063302

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