Optimization of Al2O3/TiO2 nanolaminate thin films prepared with different oxide ratios, for use in organic light-emitting diode encapsulation, via plasma-enhanced atomic layer deposition
出版年份 2016 全文链接
标题
Optimization of Al2O3/TiO2 nanolaminate thin films prepared with different oxide ratios, for use in organic light-emitting diode encapsulation, via plasma-enhanced atomic layer deposition
作者
关键词
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出版物
PHYSICAL CHEMISTRY CHEMICAL PHYSICS
Volume 18, Issue 2, Pages 1042-1049
出版商
Royal Society of Chemistry (RSC)
发表日期
2015-11-23
DOI
10.1039/c5cp06713h
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