A Film Bulk Acoustic Resonator Based on Ferroelectric Aluminum Scandium Nitride Films

标题
A Film Bulk Acoustic Resonator Based on Ferroelectric Aluminum Scandium Nitride Films
作者
关键词
-
出版物
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 29, Issue 5, Pages 741-747
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2020-08-18
DOI
10.1109/jmems.2020.3014584

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