Over 10 GHz lateral silicon photodetector fabricated on silicon-on-insulator substrate by CMOS-compatible process

标题
Over 10 GHz lateral silicon photodetector fabricated on silicon-on-insulator substrate by CMOS-compatible process
作者
关键词
-
出版物
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 54, Issue 4S, Pages 04DG06
出版商
Japan Society of Applied Physics
发表日期
2015-03-16
DOI
10.7567/jjap.54.04dg06

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