Effects of sputtering gas on microstructure and tribological properties of titanium nitride films

出版年份 2019 全文链接

标题

作者

关键词

Titanium nitride, Synchronizer ring, Sputtering gas, Microstructure, Preferred orientation, Tribological properties

出版物

Volume 488, Issue -, Pages 61-69

出版商

Elsevier BV

发表日期

2019-05-15

DOI

10.1016/j.apsusc.2019.05.148

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