Experiments and simulation of the secondary effect during focused Ga ion beam induced deposition of adjacent nanostructures
出版年份 2021 全文链接
标题
Experiments and simulation of the secondary effect during focused Ga ion beam induced deposition of adjacent nanostructures
作者
关键词
Secondary effect, Secondary particle, Numerical model, Structural characterization, Composition content, Adjacent nanostructures
出版物
MATERIALS & DESIGN
Volume 209, Issue -, Pages 109993
出版商
Elsevier BV
发表日期
2021-07-17
DOI
10.1016/j.matdes.2021.109993
参考文献
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