Structural characterization and continuous cellular automata simulation of micro structures by focused Ga ion beam induced deposition process

出版年份 2020 全文链接

标题

作者

关键词

Focused ion beam induced deposition, Process parameters, Continuous cellular automata, Precursor gas, Numerical simulation

出版物

SENSORS AND ACTUATORS A-PHYSICAL

Volume 312, Issue -, Pages 112150

出版商

Elsevier BV

发表日期

2020-06-15

DOI

10.1016/j.sna.2020.112150

向作者/读者发起求助以获取更多资源

Protocol

在线求助

Reagent

在线求助

Reprint

联系作者

Find Funding. Review Successful Grants.

Explore over 25,000 new funding opportunities and over 6,000,000 successful grants.

Explore

Publish scientific posters with Peeref

Peeref publishes scientific posters from all research disciplines. Our Diamond Open Access policy means free access to content and no publication fees for authors.

Learn More