期刊
SENSORS AND ACTUATORS B-CHEMICAL
卷 238, 期 -, 页码 83-90出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2016.07.040
关键词
Surface acoustic wave; Sensor; Ammonia; Elasticity; Mass loading; ZnO
资金
- University Grants Commission (UGC)
- Department of Science and Technology (DST)
- Defense Research and Development Organization (DRDO)
ZnO/SAW sensor was reported to give distinct response towards liquor ammonia. To study the complete mechanism, ZnO thin films (40 nm) were deposited using rf sputtering in different reactive gas composition of argon and oxygen. The increase in oxygen content (30-100%) during film growth leads to decrease in the value of stress and bond energy. The individual contribution of different SAW sensing mechanisms such as mass loading, elastic effects and acousto-electric interaction, was evaluated and analyzed to understand the distinct response for liquor ammonia. It was found that mass loading seems to get affected by the presence of stress whereas elastic loading was affected by the crystallite size and bond energy (Zn-O) in ZnO thin films. (C) 2016 Elsevier B.V. All rights reserved.
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