Orientation control of phase transition and ferroelectricity in Al-doped HfO2 thin films
出版年份 2021 全文链接
标题
Orientation control of phase transition and ferroelectricity in Al-doped HfO2 thin films
作者
关键词
Hafnium oxide, Ferroelectric, Phase transition, Thin film
出版物
MATERIALS CHARACTERIZATION
Volume 176, Issue -, Pages 111114
出版商
Elsevier BV
发表日期
2021-04-14
DOI
10.1016/j.matchar.2021.111114
参考文献
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