Influence of 20 MeV electron irradiation on the optical properties and phase composition of SiOx thin films

标题
Influence of 20 MeV electron irradiation on the optical properties and phase composition of SiOx thin films
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 123, Issue 19, Pages 195303
出版商
AIP Publishing
发表日期
2018-05-21
DOI
10.1063/1.5022651

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