Effects of AFM tip-based direct and vibration assisted scratching methods on nanogrooves fabrication on a polymer resist

标题
Effects of AFM tip-based direct and vibration assisted scratching methods on nanogrooves fabrication on a polymer resist
作者
关键词
Atomic force microscope (AFM), Nano-groove, Scratching, Thin-film
出版物
APPLIED SURFACE SCIENCE
Volume 356, Issue -, Pages 348-354
出版商
Elsevier BV
发表日期
2015-08-12
DOI
10.1016/j.apsusc.2015.08.068

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