Enabling large memory window and high reliability for FeFET memory by integrating AlON interfacial layer

标题
Enabling large memory window and high reliability for FeFET memory by integrating AlON interfacial layer
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 118, Issue 10, Pages 103503
出版商
AIP Publishing
发表日期
2021-03-08
DOI
10.1063/5.0036824

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