标题
Fatigue and retention in the growth window of ferroelectric Hf0.5Zr0.5O2 thin films
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 117, Issue 7, Pages 072901
出版商
AIP Publishing
发表日期
2020-08-17
DOI
10.1063/5.0017738
参考文献
相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。- Room-temperature deposition of ferroelectric HfO2-based films by the sputtering method
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