Excitation of high-frequency in-plane bulk acoustic resonance modes in geometrically engineered hafnium zirconium oxide nano-electro-mechanical membrane
出版年份 2020 全文链接
标题
Excitation of high-frequency in-plane bulk acoustic resonance modes in geometrically engineered hafnium zirconium oxide nano-electro-mechanical membrane
作者
关键词
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出版物
APPLIED PHYSICS LETTERS
Volume 117, Issue 6, Pages 063502
出版商
AIP Publishing
发表日期
2020-08-13
DOI
10.1063/5.0016347
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