标题
Integrating MEMS and ICs
作者
关键词
-
出版物
Microsystems & Nanoengineering
Volume 1, Issue 1, Pages -
出版商
Springer Nature
发表日期
2015-05-28
DOI
10.1038/micronano.2015.5
参考文献
相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。- CMOS-Integrated Si/SiGe Quantum-Well Infrared Microbolometer Focal Plane Arrays Manufactured With Very Large-Scale Heterogeneous 3-D Integration
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