Electrochemical Micromachining as an Enabling Technology for Advanced Silicon Microstructuring

标题
Electrochemical Micromachining as an Enabling Technology for Advanced Silicon Microstructuring
作者
关键词
-
出版物
ADVANCED FUNCTIONAL MATERIALS
Volume 22, Issue 6, Pages 1222-1228
出版商
Wiley
发表日期
2012-01-30
DOI
10.1002/adfm.201102124

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