A molybdenum MEMS microhotplate for high-temperature operation

标题
A molybdenum MEMS microhotplate for high-temperature operation
作者
关键词
-
出版物
SENSORS AND ACTUATORS A-PHYSICAL
Volume 188, Issue -, Pages 173-180
出版商
Elsevier BV
发表日期
2011-12-11
DOI
10.1016/j.sna.2011.11.023

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