Techniques and Considerations in the Microfabrication of Parylene C Microelectromechanical Systems
出版年份 2018 全文链接
标题
Techniques and Considerations in the Microfabrication of Parylene C Microelectromechanical Systems
作者
关键词
-
出版物
Micromachines
Volume 9, Issue 9, Pages 422
出版商
MDPI AG
发表日期
2018-08-23
DOI
10.3390/mi9090422
参考文献
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