A Parylene MEMS Electrothermal Valve

标题
A Parylene MEMS Electrothermal Valve
作者
关键词
-
出版物
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 18, Issue 6, Pages 1184-1197
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2009-10-23
DOI
10.1109/jmems.2009.2031689

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