The effect of nitrogen concentration on the band gap and band offsets of HfOxNy gate dielectrics

标题
The effect of nitrogen concentration on the band gap and band offsets of HfOxNy gate dielectrics
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 92, Issue 12, Pages 122901
出版商
AIP Publishing
发表日期
2008-03-25
DOI
10.1063/1.2903097

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