Atomic layer deposition of Ti-doped ZnO films with enhanced electron mobility

标题
Atomic layer deposition of Ti-doped ZnO films with enhanced electron mobility
作者
关键词
-
出版物
Journal of Materials Chemistry C
Volume 1, Issue 31, Pages 4761
出版商
Royal Society of Chemistry (RSC)
发表日期
2013-06-05
DOI
10.1039/c3tc30469h

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