Infrared and microwave shielding of transparent Al-doped ZnO superlattice grown via atomic layer deposition

标题
Infrared and microwave shielding of transparent Al-doped ZnO superlattice grown via atomic layer deposition
作者
关键词
Atomic Layer Deposition, Quartz Substrate, Dynamic Conductivity, Atomic Layer Deposition Process, Atomic Layer Deposition Cycle
出版物
JOURNAL OF MATERIALS SCIENCE
Volume 48, Issue 6, Pages 2536-2542
出版商
Springer Nature
发表日期
2012-12-04
DOI
10.1007/s10853-012-7043-5

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